Growth of ZnO Thin Films by Metalorganic Chemical Vapor Deposition Method For Ultraviolet Photodetector
碩士 === 國立虎尾科技大學 === 光電與材料科技研究所 === 99 === This study is grown ZnO films of high quality by metal organic chemical vapor deposition on silicon substrates, analysis equipment: X-ray diffraction (XRD), field emission scanning electron microscope ( SEM), Photoluminescence (PL), Hall effect (Hall effect)...
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Format: | Others |
Language: | zh-TW |
Published: |
2011
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Online Access: | http://ndltd.ncl.edu.tw/handle/jy5628 |