A PI-Fuzzy Controller for Tracking Control of the Nano-Measuring Machine
碩士 === 國立虎尾科技大學 === 自動化工程研究所 === 99 === The purpose of this paper describes a six degree–of-freedom in the nano-precision measuring machine of the tracking control. The six degree-of-freedom nano-measuring machine consists of two parts, the first part includes five piezoelectric-actuators composed o...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/7z48y4 |