The Bias Effect and Light Emission of Porous Silicon Thin Films

碩士 === 中國文化大學 === 材料科學與奈米科技研究所 === 99 === In this thesis, the anodization electrochemical etching process with an extra bias source for porous silicon manufacture was proposed. Experiments indicated that, the studied method could increase the etching rate while the PS membrane was performed with the...

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Bibliographic Details
Main Authors: Chia-Kuo Chen, 陳家國
Other Authors: Jia-Chuan Lin
Format: Others
Language:zh-TW
Published: 2011
Online Access:http://ndltd.ncl.edu.tw/handle/72824734854693739844