The Bias Effect and Light Emission of Porous Silicon Thin Films
碩士 === 中國文化大學 === 材料科學與奈米科技研究所 === 99 === In this thesis, the anodization electrochemical etching process with an extra bias source for porous silicon manufacture was proposed. Experiments indicated that, the studied method could increase the etching rate while the PS membrane was performed with the...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2011
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Online Access: | http://ndltd.ncl.edu.tw/handle/72824734854693739844 |