The Fabrication of Porous Silicon Multi-Sensor Array
碩士 === 中國文化大學 === 材料科學與奈米科技研究所 === 99 === A mask-free process for manufacturing patternable porous silicon (PS) with using the plastic shelter setup has been characterized. By setting the experimental conditions including the anodization etching current density, concentration of hydrofluoric acid b...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/63607691411613149844 |