Manufacture of Porous Silicon Micro-Sensors Array
碩士 === 聖約翰科技大學 === 電子工程系碩士班 === 99 === In the study, the presision dicing system was used to form trenched porous silicon (PS) samples that were compared with the traditional PS samples without trench.To form the trenched PS samples, the blue-tapes were used as the mask to protect the samples from t...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/78537749003630417103 |