Manufacture of Porous Silicon Micro-Sensors Array

• Main Authors: Peng, Chun Cheng, 彭俊誠
• Other Authors: Jia-Chuan Lin
• Format: Others
• Language: zh-TW
• Published: 2011
• Online Access: http://ndltd.ncl.edu.tw/handle/78537749003630417103

碩士 === 聖約翰科技大學 === 電子工程系碩士班 === 99 === In the study, the presision dicing system was used to form trenched porous silicon (PS) samples that were compared with the traditional PS samples without trench.To form the trenched PS samples, the blue-tapes were used as the mask to protect the samples from the etching.In the experiment, nine individual sensors can be formed on the same chip to sense various targets. And a sensor array can be obtained.To obtain the trenched samples and traditional samples, the P-type silicon wafers were served as the raw material.Various electrochemical etching parameters were used and the results were discussed in the theses.In addition, the scanning electron microscope (SEM), 3D profile measurement, and photoluminescence (PL) were used to analyze the film quality on the film structure and electro-optical properties. Also, the sensitivity of the sensor array can be measured on the I-V measurement.Such a sensor array can served as the detector for ethylate, oxalate, glucose, soda water and so on.