Characterization of Electro-Optical Properties of Amorphous Indium Tin Oxide Films Sputtered of Room Temperature
碩士 === 南台科技大學 === 光電工程系 === 99 === This thesis presents the indium tin oxide (ITO) thin film deposited on glass substrates by RF magnetron sputter system. We use the different conditions of sputter and annealing parameter and the electro-optical characteristics influence. In the sputtering condition...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
100
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| Online Access: | http://ndltd.ncl.edu.tw/handle/72026808625505305322 |