Design of Multiple RESURF LDMOS with P-top rings and STI regions in 65nm CMOS Technology
碩士 === 亞洲大學 === 資訊工程學系碩士班 === 99 === In this work, a novel multiple RESURF P-top rings LDMOS with shallow trench isolation (STI) stucture based on the 65 nm baseline low-voltage CMOS technology by three-dimentsional Sentaurus process and device simulations. A optimized uniform electric filed distrib...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/41798275984609977509 |
| Summary: | 碩士 === 亞洲大學 === 資訊工程學系碩士班 === 99 === In this work, a novel multiple RESURF P-top rings LDMOS with shallow trench isolation (STI) stucture based on the 65 nm baseline low-voltage CMOS technology by three-dimentsional Sentaurus process and device simulations. A optimized uniform electric filed distribution in N-drift region can be obtained by empolying the multiple P-top rings process instead of the past proposed gate field plates method in the extended drain regions. By this way, not only both of high breakdown voltage exceeded over 40V and low on-resistance below 20 m-mm2 can be achieved, but also the effect of WN-drift/WSTI ratio on device can be reduce to otain the larger optimal window of device characteristics, as compared with the conventional DIELER and graded gate field plate devices.
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