Study on The Pulsed Laser Deposition of Sb-doped p-type ZnO Thin Films
碩士 === 國立臺北科技大學 === 光電工程系研究所 === 99 === In this study, we deposited p-type ZnO:Sb thin films on the c-plane sapphire substrates by pulsed laser deposition. The Nd:YAG Q-switched laser with 266nm wavelength was used for ablating the ZnO:Sb targets made by sintering pressed ZnO and Sb2O3 powders unde...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/gn8rw4 |