Precision Positioning Control of Linear Stage Using System identification Based aaaaa on Genetic Algorithm
碩士 === 國立臺北科技大學 === 自動化科技研究所 === 99 === In recent years, high-speed and high-accuracy productions are inevitable trend in semiconductor, optoelectronics, and other industries. Therefore, using the linear motor systems in manufacturing equipments, which is able to satisfy industries requirements for...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/4jrbb6 |