Utilization of CuInGa Ternary Alloy Target on CIGS Thin Films
碩士 === 國立臺北科技大學 === 製造科技研究所 === 99 === In this study, CIGS films were fabricated by selenization of single-sputtered CuInGa precursors using a CuInGa ternary alloy target. The effects of 2-stage and 4-stage selenization process on the CIGS thin films were investigated. SEM, XRD, EPMA and Hall meansu...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/dfs6yd |