Electromagnetic Performance of Diamond Like Carbon Films Grown on Quartz Substrates Using the Microwave Plasma Jet Chemical Vapor Deposition System
碩士 === 國立臺北科技大學 === 製造科技研究所 === 99 === Different forms of carbon widely exist in the Earth and one of them is Diamond like carbon (DLC) film, which is organized by sp2 and sp3 bonds. By changing the ratio of sp2 to sp3 in DLC film, DLC film can simultaneously have the material characteristics of dia...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/n67c75 |