A Study of low noise capacitor readout circuit on MEMS-Pressure device
碩士 === 國立臺北科技大學 === 機電整合研究所 === 99 === In this thesis, a new type of capacitor sensor composed of pressure and CMOS circuitry is proposed. The capacitor variation can be measured directly by means of the proposed sensing circuit, which is composed of an impedance amplifier and a switched-capacitor a...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/92w6tg |