Fabrication and Characterization of CMOS Micro-Fluxgate with Wire-Bonding and Flip-Chip Post Process
碩士 === 國立臺北科技大學 === 機電整合研究所 === 99 === This paper presents a dual-core (Vacquier-type) micro-fluxgate magnetic sensor fabricated on a silicon chip based on standard CMOS technology. The 3D design with both excitation and sensing coils winding the cores can achieve a higher responsivity and a lower n...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/dkvq9v |