Optical properties of diamond-like carbon thin films
碩士 === 國立臺北科技大學 === 材料及資源工程系研究所 === 99 === In this study, the deposition of non-hydrogenated diamond-like carbon (DLC) films by the cathodic arc deposition of the industrial production equipment. The deposition parameters of DLC thin films were undoped hydrogen conditions and changed the bias parame...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/qdp9hg |