Optical properties of diamond-like carbon thin films
碩士 === 國立臺北科技大學 === 材料及資源工程系研究所 === 99 === In this study, the deposition of non-hydrogenated diamond-like carbon (DLC) films by the cathodic arc deposition of the industrial production equipment. The deposition parameters of DLC thin films were undoped hydrogen conditions and changed the bias parame...
Main Authors: | , |
---|---|
Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2011
|
Online Access: | http://ndltd.ncl.edu.tw/handle/qdp9hg |