Study on Application of Diffravctive Laser Optical En-coder to Nanopositioning
碩士 === 淡江大學 === 機械與機電工程學系碩士班 === 99 === The positioning technique are widely used in various fields. Its positioning ca-pability of the stage usually influences the performance of the instruments or machines. The positioning capability of the stage, however, strongly depends on the displacement se...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/22846923330353350046 |