Study on Application of Diffravctive Laser Optical En-coder to Nanopositioning

• Main Authors: SHIU,SHIOU-DE, 許修得
• Other Authors: Chyan-Chyi Wu
• Format: Others
• Language: zh-TW
• Published: 2011
• Online Access: http://ndltd.ncl.edu.tw/handle/22846923330353350046

碩士 === 淡江大學 === 機械與機電工程學系碩士班 === 99 === The positioning technique are widely used in various fields. Its positioning ca-pability of the stage usually influences the performance of the instruments or machines. The positioning capability of the stage, however, strongly depends on the displacement sensing technique. In order to raise the precision of the measurement and positioning, we adopted the laser encoder to serve as the feedback system, which can effectively slash the environmental disturbance. We integrated it and the actua-tor to control the positioning stage. In this study, we integrated the laser encoder, which was developed by our labor-atory, and the nanopositioning stage to construct a new positioner. We also studied the step motor, the piezoelectric actuator, the laser encoder feedback system and the phase decoding algorithm for the positioning stage. According to our experimental results, the maximum discrepancy between our system and HP5529A in 30 um range is 12.043 nm, the maximum discrepancy between our system and HP5529A in 60 um is 15.371 nm, the maximum discrepancy between our system and HP5529A in 360 um is 5.74 um, the maximum discrepancy between our system and HP5529A in 10.8 mm is 62.191 um.