Nano-Scale Mechanical Relays by Nano-imprint Technology
碩士 === 國立雲林科技大學 === 機械工程系碩士班 === 99 === Integrated circuit (IC), fabricated by the semiconductor processes, consists of billions of transistors in a single chip of millimeter in size nowadays. With the fast evolution of the fabrication technology, the minimum feature size in IC has been down to less...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/95635332752908346091 |