Fabrication and Development of Vaporizing Liquid MEMS Micro-thruster with Silicon Nanowires Array Inside for Space Applications
碩士 === 國立雲林科技大學 === 機械工程系碩士班 === 99 === In this study, the space microthruster chip grown with silicon nanowires (SiNWs) array on the surface of vaporizing liquid chamber was developed and fabricated by using MEMS (Micro electro mechanical systems) and electroless metal deposition (EMD) technologies...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/87764020534153903277 |