Fabrication and Development of Vaporizing Liquid MEMS Micro-thruster with Silicon Nanowires Array Inside for Space Applications

• Main Authors: Wei-Shan Chen, 陳維杉
• Other Authors: Chien-Wei Liu
• Format: Others
• Language: zh-TW
• Published: 2011
• Online Access: http://ndltd.ncl.edu.tw/handle/87764020534153903277

碩士 === 國立雲林科技大學 === 機械工程系碩士班 === 99 === In this study, the space microthruster chip grown with silicon nanowires (SiNWs) array on the surface of vaporizing liquid chamber was developed and fabricated by using MEMS (Micro electro mechanical systems) and electroless metal deposition (EMD) technologies. The thermal flow experimental of space microthruster chip was done and proposed. The SiNWs array with a uniform diameter of around 200 nm was made by using EMD method with a solution mixed ratio of AgNO3/HF=0.02 M/5.0 M. The SiNWs array with a diameter of 200 nm deposited with a C4F8 thin film can obtain a super-hydrophobic surface with a contact angle of 158o. The present work can readily occur the fully liquid vaporizing under a heating temperature of 150 oC and a DI water flow rate of 0.5 cc/min. This is due to that the SiNWs array surface coated with C4F8 thin film has a high specific surface area, a nano-porous like structure and a super-hydrophobic surface can rapidly and uniformly generate a large amount of vaporized air bubbles and effectively transfer the heat from the heating chamber to DI water flow to enhance the boiling of SiNWs based MEMS microthruster.