Least-squares Iterative Algorithm in Multi-wavelength Polarization Phase-Shifting Interference Microscope

碩士 === 國立中正大學 === 光機電整合工程研究所 === 100 === We use a multi-wavelength polarization phase shifting interference microscope with least-squares iterative algorithm to measure objective’s profile. Traditional phase-shifting interferometry has to observe the theorem’s supposition of the phase step. Othe...

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Bibliographic Details
Main Authors: Chen, Hung-Yuan, 陳泓元
Other Authors: Chen, Jenq-Shyong
Format: Others
Language:zh-TW
Published: 2012
Online Access:http://ndltd.ncl.edu.tw/handle/64980588486373830403