Analysis and Research of Photoresist Stacking Process
碩士 === 中華大學 === 機械工程學系碩士在職專班 === 100 === This thesis is a study on TSV photolithography and etch process by using available resources to achieve the same functions of SU-8 photoresi- st,It helps to determine the correlation of polyimide photoresist thickn- ess versus etch depth during the etch proce...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/99942708671779880223 |