Effect of annealing conditions on structural and optical characteristics of Al-doped ZnO thin films

碩士 === 建國科技大學 === 電子工程系暨研究所 === 100 === In this paper, the Al-doped zinc oxide thin films produced by sol-gel method were studied. Traditional high-temperature furnace was used for pre-thermal treatment and the rapid thermal annealing for post-thermal treatment. The rapid thermal annealing using hal...

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Bibliographic Details
Main Author: 洪銘鴻
Other Authors: 白世南
Format: Others
Language:zh-TW
Published: 2012
Online Access:http://ndltd.ncl.edu.tw/handle/98123100072182074973