Effect of annealing conditions on structural and optical characteristics of Al-doped ZnO thin films
碩士 === 建國科技大學 === 電子工程系暨研究所 === 100 === In this paper, the Al-doped zinc oxide thin films produced by sol-gel method were studied. Traditional high-temperature furnace was used for pre-thermal treatment and the rapid thermal annealing for post-thermal treatment. The rapid thermal annealing using hal...
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/98123100072182074973 |