The Structure and Optical Properties of AlN Thin Film by DC reactive Magnetron Sputtering System
碩士 === 中原大學 === 電子工程研究所 === 100 === In this thesis, AlN thin film was grown on sapphire using DC magnetron sputtering system. The AlN thin film exhibits c axis preferred orientation, and low R.M.S roughness. The dependence of film quality on growth parameters, such as total sputtering pressure, subs...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/53233460986284203479 |