Fabrication Study of Undoped and Si-doped AlN Thin Films Prepared by Helicon Sputtering Method
碩士 === 中原大學 === 電子工程研究所 === 100 === Our research group has studied AlN thin films for a long time. The thin film growth, as well as the optoelectronic device applications, of AlN has been developed in the past. However, for more applications of AlN thin films, such as high power devices or deep UV o...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/12653143487810096868 |