Fabrication and Measurement of Capacitive Electrostatic Microsensors
碩士 === 逢甲大學 === 自動控制工程所 === 100 === Based on microelectromechanical system technology, a novel capacitive electrostatic sensor is designed and fabricated for industrial safety detection. The leakage of industrial electrostatic charge can be measured based on deformed capacitive electrodes that cause...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/03787303454532269843 |