Dynamic Modeling of the AlN Film Specimen toMeasure the Mechanical Properties during Nano-Indentation Tests
碩士 === 遠東科技大學 === 機械工程研究所在職專班 === 100 === A mechanical model is developed in the present study for the AlN film specimen in order to evaluate their contact areas varying with the loading/ unloading rate given in nano-indentation tests. Two governing differential equations are derived for the depth s...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/11622976580576470867 |