Dynamic Modeling of the AlN Film Specimen toMeasure the Mechanical Properties during Nano-Indentation Tests

• Main Authors: Chen, Jian-An, 陳建安
• Other Authors: Ha, Jih-Lian
• Format: Others
• Language: zh-TW
• Published: 2012
• Online Access: http://ndltd.ncl.edu.tw/handle/11622976580576470867

碩士 === 遠東科技大學 === 機械工程研究所在職專班 === 100 === A mechanical model is developed in the present study for the AlN film specimen in order to evaluate their contact areas varying with the loading/ unloading rate given in nano-indentation tests. Two governing differential equations are derived for the depth solution of the indenter tip and the depth solution formed at the separation point; they are expressed in a power form of the depth parameters. All spring/block coefficients and damping coefficients shown in these two differential equations associated with the elastic/plastic and viscous effects respectively are determined by the real-coded genetic algorithm. In either the loading or unloading process, an asymptotic formula is applied to incorporate the experimental data shown at small and large indentation depths. Sink-in behavior and size effect is included in the evaluation of the contact projected area. The contact area solutions obtained from the present model can be evaluated the mechanical properties of the AlN film specimen.