Study on Microwave Plasma Enhanced Chemical Vapor Deposition Using Particle-In-Cell Simulations
碩士 === 輔仁大學 === 物理學系 === 100 === In this thesis, we have studied a Microwave Plasma Enhanced Chemical Vapor Deposition (MPECVD) system for material processing using a particle-in-cell simulation. For an MPECVD system at a pressure up to 1 torr and with an input microwave power up to 1 kW, by employi...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/77779294058139536500 |