Solving deteriorating ion implant scheduling problem in wafer fabrication.

碩士 === 輔仁大學 === 企業管理學系管理學碩士班 === 100 === In recent years, semiconductor industry in Taiwan faces great impact from the world economical upheaval and fierce competitions from emerging countries in semiconductor industry, such as China and South Korea. It is essential for businesses in semiconductor i...

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Bibliographic Details
Main Authors: Yi-Hen Chen, 陳怡涵
Other Authors: Huang Ronghwa
Format: Others
Language:zh-TW
Published: 2012
Online Access:http://ndltd.ncl.edu.tw/handle/vgg8d8