Study Of Microstructures And Electro-optic Properties On Sputtering AZO With Metal Electrode Thin Films
碩士 === 義守大學 === 電子工程學系 === 100 === In this study, the different metal thin films were sputtered to form AZO/Metal/AZO sandwich structures, the Penetration was controlled higher than 80% and the conductivity properties of thin films was enhanced. The RF magnetron sputtering system had been used to de...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/87547826781766137429 |