Theoretical Investigation Of SAW Propagation Characteristics In AlN/ZnO/Silicon And ZnO/AlN/Silicon Structures
碩士 === 義守大學 === 電機工程學系 === 100 === In this thesis, the finite element method is employed to calculate surface acoustic wave (SAW) characteristics in (100)ZnO/Silicon based structures with different electrical interfaces; i.e., IDT/(100)ZnO/Silicon, (100)ZnO/IDT/Silicon, IDT/(100) ZnO/thin metal film...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/49803175650391733584 |