The properties of AZO/Cu/AZO films deposited by sputtering and post hydrogen plasma treatment at low temperature
碩士 === 崑山科技大學 === 電機工程研究所 === 100 === In this study, we used RF magnetron sputtering to grow AZO/Cu/AZO tri-layer films on plastic and glass substrates. The films were processesd by changing Cu thickness to get appropriate properties of films. After deposition, the sample were treated in hydrogen p...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2012
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Online Access: | http://ndltd.ncl.edu.tw/handle/75230675160547798551 |