The properties of AZO/Cu/AZO films deposited by sputtering and post hydrogen plasma treatment at low temperature
碩士 === 崑山科技大學 === 電機工程研究所 === 100 === In this study, we used RF magnetron sputtering to grow AZO/Cu/AZO tri-layer films on plastic and glass substrates. The films were processesd by changing Cu thickness to get appropriate properties of films. After deposition, the sample were treated in hydrogen p...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/75230675160547798551 |