Study on Characterizations of Ti:DLC Films by High Power Impulse Magnetron Sputter Technology
碩士 === 明道大學 === 材料科學與工程學系碩士班 === 100 === In this work, titanium-containing diamond-like carbon (Ti-DLC) thin films have been deposited using high power impulse magnetron sputtering (HiPIMS) in an argon atmosphere with graphite and titanium targets. The substrate rotated between two facing magnetr...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/40686236220362539572 |