A study of fabrication process for the Cr-Si-N nanocomposite thin films on ABS plastic substrates
碩士 === 明志科技大學 === 材料工程研究所 === 101 === In this study, the Cr-Si-N nanocomposite thin films were prepared on plastic materials and silicon wafer substrate by a hybrid coating system, which includes cathodic arc evaporation, pulse DC magnetron sputtering and ion-assisted deposition components. The nano...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/94552344511650993087 |