Applications of Thin Film Optical Measurement System and Measurement System Analysis

碩士 === 明志科技大學 === 機電工程研究所 === 100 === Optical inspection technology is often applied in optical components, thin-film materials, and measurements of the surface roughness of metal surface processing. This study aimed to develop an optical measurement system with high measurement speed and high accur...

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Bibliographic Details
Main Authors: Po-Jen Huang, 黃柏仁
Other Authors: Chil-Chyuan Kuo
Format: Others
Language:zh-TW
Published: 2012
Online Access:http://ndltd.ncl.edu.tw/handle/72576120143223212122