Fabrication and characterization of transparent conducting ZnO:Al,F thin film for thin-film solar cell applications
碩士 === 國立中興大學 === 光電工程研究所 === 100 === In this study, we deposited Al and F doped zinc oxide thin films on the EagleXG glass by RF magnetron sputtering. Four Al2O3 contents (0 wt%, 1 wt%, 2 wt%, and 4 wt%) and a fixed ZnF2 content (1.5 wt.%) were used to prepare sputtering targets labeled as FZO, A1F...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/53586631977142825332 |