Fabrication of high-transmittance ITO conducting films on PC substrates using multi-target sputtering
碩士 === 國立中興大學 === 材料科學與工程學系所 === 100 === In this study, the multi-target and dual-power (DC & RF) magnetron sputtering system was adopted to deposit anti-reflective films (SiO2 and TiO2) and transparent conducting film (indium-tin oxide, ITO) on polycarbonate substrates for touch plane applicati...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/49333838303369269578 |