Fabrication of nanostructure on silicon substrate
碩士 === 國立中興大學 === 生醫工程研究所 === 100 === In this study, the anodic anodization and the electroless metal deposition (EMD) were utilized for the fabrication of nano-structure on the surface of silicon. It is desired that a low-cost mass production technique for the fabrication of nanoporous silicon can...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/34742339276727344296 |