Functional Nanocomposite Thin Films Deposited by Plasma Deposition
博士 === 國立成功大學 === 化學工程學系碩博士班 === 100 === Diamond-like carbon (DLC) nanocomposite films containing nanostructures were synthesized by various deposition techniques, including inductively-coupled plasma chemical vapor deposition (ICP-CVD), sputtering-assisted CVD, capacitive-coupled plasma CVD, plas...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/50052498308210268277 |