Growth of 3C-SiC films on Si substrates by Vapor-Liquid-Solid tri-phase epitaxy
碩士 === 國立成功大學 === 材料科學及工程學系碩博士班 === 100 === Epitaxial 3C-SiC films grown on the Si substrates are highly desired in the high-power high-frequency integrated circuits and as the substrates for the growth of LEDs. Physical vapor transport and chemical vapor deposition are the two methods most ofte...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/01878051465746412357 |