Exploration of TiO2 nanorods using sputtering
碩士 === 國立成功大學 === 材料科學及工程學系碩博士班 === 100 === In this study, two methods to grow the TiO2 nanorod structures were investigated: the RIE (reactive ion etching) approach and a seed layer approach using sputtering. For the RIE study, different RIE conditions were explored to make different degree of roug...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/12054738303820943892 |