Study of Ultra-thin Seedless Cu Diffusion Barrier in Advanced Cu Metallization
博士 === 國立成功大學 === 微電子工程研究所碩博士班 === 100
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/84452187920297981193 |