A Novel Pd/Pt/High-K dielectric/n-Silicon MIS Schottky Diode with 3D Nano Rod Structure for Hydrogen Sensing Applications
碩士 === 國立成功大學 === 微電子工程研究所碩博士班 === 100 === We developed the 3D nano rod structure Al/PdPt/ high-K/n-Si/Al MIS Schottky diode for H2 gas sensing applications. Firstly, the Si nano rods were formed on the n type (100) Si substrates with AgNO3and HF mixed etching solution. Then deposited the intrinsic...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/11098908232294988527 |