Metal Contact Print Photolithography for Fabrication of High Frequency Surface Acoustic Wave Device and Experimental Measurement
碩士 === 國立成功大學 === 機械工程學系碩博士班 === 100 === This thesis describes a new method to fabricate high frequency surface acoustic wave (SAW) devices. With the new method known as metal contact printing photolithography (MCPP), we can fabricate SAW devices with a 500 nm line-width, and the central frequency o...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/85573187174727816635 |