Applying the AVM System to the TFT-LCD Industry

博士 === 國立成功大學 === 製造資訊與系統研究所碩博士班 === 100 === Processing quality of thin film transistor-liquid crystal display (TFT-LCD) manufacturing is a key factor for production yield. The processing quality of tool will affect the production yield. The conventional sampling approach cannot receive processing q...

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Bibliographic Details
Main Authors: Wen-HuangTsai, 蔡文皇
Other Authors: Fan-Tien Cheng
Format: Others
Language:en_US
Published: 2012
Online Access:http://ndltd.ncl.edu.tw/handle/92417317215792161345