Fabrication of MEMS Microphone with 3-D Diaphragm
碩士 === 國立暨南國際大學 === 電機工程學系 === 100 === In this thesis, the MEMS microphone with 3-D diaphragm was fabricated. The 3-D structures were fabricated by etching of TEOS oxide and the rounding of step coners. The poly-Si was deposited on the 3D structure as the diaphragm. The 3-D diaphragm was released...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/65113634927256959129 |