Application of Silicon Nanowire P-I-N Diode in Biosensing
碩士 === 國立交通大學 === 材料科學與工程學系奈米科技碩博士班 === 100 === In this thesis, silicon nanowire P-I-N diode array with width of ca. 110 nm and thickness of 45 nm was successfully fabricated using e-beam lithography for biosensing applications. The characteristics of silicon nanowire P-I-N diode has been characteri...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/90556459063236839200 |