Fabrication and Characterization of the Micromachined Inductor with NiFe-AAO Nanocomposite Core
碩士 === 國立交通大學 === 電子研究所 === 100 === This study presents the fabrication and characterization of spiral inductors which is a suspended MEMS structure with NiFe(83 at% Ni and 16 at% Fe)-AAO nanocomposite core. The NiFe nanorods with 60~70nm diameter are electorplated and isolated in AAO(Anodic Aluminu...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/02046679243914147697 |